Consejo Nacional de Investigaciones Científicas y Técnicas — Argentina
Engineering · Physical Sciences
18h-index1.2kcitations92works3.52yr avg
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Research Topics
Semiconductor materials and devices(64), Advancements in Semiconductor Devices and Circuit Design(60), Integrated Circuits and Semiconductor Failure Analysis(14), Thin-Film Transistor Technologies(12), Silicon and Solar Cell Technologies(12)
Publications92 total
Journal of Physics Condensed Matter·2025
The Journal of Chemical Physics·2025· 3 cited
The Journal of Chemical Physics·2025· 4 cited
The Journal of Physical Chemistry B·2024· 8 cited
Physical review. E·2024
The European Physical Journal E·2024· 8 cited
arXiv (Cornell University)·2024Open Access
The Journal of Chemical Physics·2024· 2 cited
The Journal of Chemical Physics·2024· 10 citedOpen Access
arXiv (Cornell University)·2023Open Access
The Journal of Chemical Physics·2023· 9 cited
Optical and electrical diagnostics of industrial plasma reactors: measuring the relevant physical quantities to assist process development
HAL (Le Centre pour la Communication Scientifique Directe)·2022
Cycling process in remote plasma source for selective etching with nanometric control
HAL (Le Centre pour la Communication Scientifique Directe)·2021
ECS Meeting Abstracts·2021· 2 cited
Surface and plasma characterization of a self-limited two step etch process for SiN spacer etching applications.
HAL (Le Centre pour la Communication Scientifique Directe)·2021
2021· 1 cited
Enabling Next Generation CMOS by Novel EOT Scaling Module
Symposium on VLSI Technology·2021· 1 cited
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Frequent Co-authors
T. Skotnicki(23), S. Denorme(17), D. Dutartre(14), F. Leverd(14), S. Monfray(13), F. Bœuf(13), S. Barnola(11), P. Gouraud(11), P. Perreau(10), B. Doris(10), G. Bidal(10), C. Fenouillet-Béranger(9), T. Salvetat(9), G. Ghibaudo(8), O. Faynot(7), C. Laviron(7), R. Wacquez(7), D. Chanemougame(7), J.-L. Huguenin(7), L. Grenouillet(6)