D. Hausmannd

Lam Research (United States) — United States

Engineering · Physical Sciences

0h-index0citations1works0.02yr avg

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Research Topics

Semiconductor materials and devices(1), Copper Interconnects and Reliability(1), Semiconductor materials and interfaces(1)

Publications1 total

Investigating the difference in nucleation during Si-based ALD on different surfaces for future area-selective deposition

2018

Frequent Co-authors

Ekaterina A. Filatova(1), Alfredo Mameli(1), Adriaan J. M. Mackus(1), F. Roozeboom(1), W. M. M. Kessels(1), Simon D. Elliott(1)