Ekaterina A. Filatova

Colorado School of Mines — United States

Engineering · Physical Sciences

4h-index245citations6works0.02yr avg
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Research Topics

Semiconductor materials and devices(6), Copper Interconnects and Reliability(4), Silicon Carbide Semiconductor Technologies(2), ZnO doping and properties(1), Catalytic Processes in Materials Science(1)

Publications6 total

Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2019· 114 citedOpen Access
Area selective atomic layer deposition of Si-based materials
Cork Open Research Archive (University College Cork)·2019· 1 citedOpen Access
Investigating the difference in nucleation during Si-based ALD on different surfaces for future area-selective deposition
2018
Understanding the Mechanism of SiC Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Developing Routes toward SiC Atomic Layer Deposition (ALD) with Density Functional Theory
ACS Applied Materials & Interfaces·2018· 39 cited
Investigating routes toward atomic layer deposition of silicon carbide: <i>Ab initio</i> screening of potential silicon and carbon precursors
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2016· 17 cited
<b>Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition</b>
Advanced Materials·2015· 74 cited

Frequent Co-authors

Simon D. Elliott(5), Dennis M. Hausmann(3), Rafaiel A. Ovanesyan(1), David C. Smith(1), Sumit Agarwal(1), Gangotri Dey(1), Yasheng Maimaiti(1), Hayrensa Ablat(1), Glen N. Fomengia(1), Alfredo Mameli(1), Adriaan J. M. Mackus(1), F. Roozeboom(1), W. M. M. Kessels(1), D. Hausmannd(1)