Wayne J. Dunstan

Engineering · Physical Sciences

9h-index286citations27works0.02yr avg
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Research Topics

Advancements in Photolithography Techniques(13), Advanced Combustion Engine Technologies(5), Combustion and flame dynamics(5), Control Systems and Identification(4), Laser-induced spectroscopy and plasma(4)

Publications27 total

Performance optimization of MOPA pre-pulse LPP light source
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2015· 45 cited
CO<sub>2</sub>/Sn LPP EUV sources for device development and HVM
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2013· 7 cited
High power EUV LPP
2013
Laser produced plasma EUV sources for device development and HVM
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2012· 17 cited
Laser produced plasma light source for EUVL
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2011· 7 cited
LPP source system development for HVM
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2011· 13 cited
LPP source system development for HVM
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010· 8 cited
Laser-produced plasma light source for EUVL
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010· 22 cited
Lithography light source fault detection
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010
Lithography line productivity impact using Cymer GLX technology
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 2 cited
Performance demonstration of significant availability improvement in lithography light sources using GLX control system
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 5 cited
Increased availability of lithography light sources using advanced gas management
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 4 cited
Active spectral control of DUV light sources for OPE minimization
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2006· 10 cited
XLA-200: the third-generation ArF MOPA light source for immersion lithography
Optical Microlithography XVIII·2005· 2 cited
Nonlinear model validation using multiple experiments
2004· 3 cited
Modeling and Control of Combustion Dynamics in Industrial Gas Turbines
2004· 21 cited
Empirical Estimation of Parameter Distributions in System Identification
IFAC Proceedings Volumes·2003· 7 cited
Identification of resonant systems using periodic multiplicative reference signals
IFAC Proceedings Volumes·2003· 2 cited
System identification of nonlinear resonant systems
PhDT·2003· 10 cited
Validation test design for a nonlinear model developed from limit cycle data
2002· 2 cited
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Frequent Co-authors

Robert R. Bitmead(9), Daniel J. Brown(8), Igor V. Fomenkov(8), Alex I. Ershov(8), G. Vaschenko(8), Robert N. Jacques(8), David C. Brandt(7), N. Böwering(7), David W. Myers(7), Richard L. Sandstrom(7), Shailendra N. Srivastava(6), Chirag Rajyaguru(6), Silvia De Dea(6), Robert Bergstedt(6), Alexander N. Bykanov(5), Imtiaz Ahmad(5), Guomin Zhang(5), Robert J. Rafac(5), A. A. Schafgans(4), Sergio M. Savaresi(4)