L.A. Charni

National University of Science and Technology — Russia

Engineering · Physical Sciences

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Research Topics

Semiconductor materials and devices(1), Silicon Nanostructures and Photoluminescence(1), Ion-surface interactions and analysis(1)

Publications1 total

Features of buried dielectric layers: ion beam synthesis in silicon by a high temperature sequential oxygen and nitrogen implantation with substoichiometric doses
Materials Science and Engineering B·1992

Frequent Co-authors

A.B. Danilin(1), K.A. Drakin(1), A. A. Malinin(1), Yu. N. Parkhomenko(1), A. F. Petrov(1), O.I. Vyletalina(1)