Delphine Longrie

Engineering · Physical Sciences

6h-index266citations14works0.02yr avg
OpenAlex↗Google Scholar↗

Accepting Students?

No reports yet. Know if this professor is taking students?

Research Topics

Semiconductor materials and devices(12), Catalytic Processes in Materials Science(9), Electronic and Structural Properties of Oxides(4), Metal and Thin Film Mechanics(3), Copper Interconnects and Reliability(3)

Publications14 total

Plasma-enhanced ALD on particles and powders
Ghent University Academic Bibliography (Ghent University)·2016Open Access
Thermal and plasma enhanced atomic layer deposition on powders and particles
Ghent University Academic Bibliography (Ghent University)·2016Open Access
Plasma Enhanced Atomic Layer Deposition on Powders
ECS Transactions·2014· 6 cited
Plasma Enhanced Atomic Layer Deposition on Powders
ECS Meeting Abstracts·2014
Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH<sub>3</sub> on Particles Agitated in a Rotary Reactor
ACS Applied Materials & Interfaces·2014· 40 cited
Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor
Ghent University Academic Bibliography (Ghent University)·2014Open Access
Reactor concepts for atomic layer deposition on agitated particles: A review
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2013· 103 cited
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
Ghent University Academic Bibliography (Ghent University)·2013Open Access
Atomic layer deposition for surface engineering of powders
Ghent University Academic Bibliography (Ghent University)·2013· 3 cited
Thermal and Plasma-enhanced ALD of TiN on Powders using a Rotary Reactor
Ghent University Academic Bibliography (Ghent University)·2013Open Access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
Surface and Coatings Technology·2012· 50 citedOpen Access
Plasma-Enhanced ALD of Platinum with O<sub>2</sub>, N<sub>2</sub>and NH<sub>3</sub>Plasmas
ECS Journal of Solid State Science and Technology·2012· 45 cited
Comparison of three processes for plasma-enhanced ALD of platinum
Ghent University Academic Bibliography (Ghent University)·2012Open Access
Texture of atomic layer deposited ruthenium
Microelectronic Engineering·2009· 19 cited

Frequent Co-authors

Christophe Detavernier(13), Davy Deduytsche(12), Kris Driesen(7), J. Haemers(6), Geert Rampelberg(5), S. Van den Berghe(3), Jo Haemers(2), Kilian Devloo-Casier(2), Philippe F. Smet(1), Jan Musschoot(1), Qi Xie(1), K. De Keyser(1), R.L. Van Meirhaeghe(1), Jan D’Haen(1), Véronique Cremers(1)