Jo Haemers

Engineering · Physical Sciences

3h-index95citations3works0.02yr avg
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Research Topics

Metal and Thin Film Mechanics(2), Semiconductor materials and devices(2), Catalytic Processes in Materials Science(1), Fusion materials and technologies(1), Plasma Diagnostics and Applications(1)

Publications3 total

Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH<sub>3</sub> on Particles Agitated in a Rotary Reactor
ACS Applied Materials & Interfaces·2014· 40 cited
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
Surface and Coatings Technology·2012· 50 citedOpen Access
Influence of the magnetic field configuration on the reactive sputter deposition of TiN
physica status solidi (a)·2009· 5 cited

Frequent Co-authors

Delphine Longrie(2), Davy Deduytsche(2), Kris Driesen(2), Christophe Detavernier(2), Philippe F. Smet(1), Francis Boydens(1), Stijn Mahieu(1), Diederik Depla(1)