Materials Science · Physical Sciences
8h-index792citations18works0.02yr avg
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Research Topics
Silicon Nanostructures and Photoluminescence(7), Nanowire Synthesis and Applications(7), Semiconductor materials and devices(6), Integrated Circuits and Semiconductor Failure Analysis(4), Advancements in Photolithography Techniques(3)
Publications18 total
Clean Room Airborne Molecular Contamination (AMC) on Damascene Cu Interconnects ISSM Paper: YE-P-069
2007
IEEE International Symposium on Semiconductor Manufacturing conference proceedings·2006
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2000· 4 cited
Applied Physics Letters·1993· 36 cited
The Journal of Physical Chemistry·1993· 12 cited
The Journal of Physical Chemistry·1993· 42 cited
Journal of Electronic Materials·1992· 32 cited
Journal of Electronic Materials·1992· 25 cited
Applied Physics Letters·1992· 257 cited
Integrated Photonics Research·1992
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1992· 61 cited
Applied Physics Letters·1991· 315 citedOpen Access
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1991· 2 cited
Frequent Co-authors
John White(8), Chuen‐Jinn Tsai(7), Joe C. Campbell(7), G. E. Poirier(4), K. -H. Li(4), K.-H. Li(2), J. Sarathy(2), S. Shih(2), J.M. White(2), Bill Brennan(2), Kin Sang Lam(2), Pete Beckage(2), K. -H. Li(1), D. Kinosky(1), Ruizhe Qian(1), Ting-Chen Hsu(1), J. Irby(1), Sanjay K. Banerjee(1), A.F. Tasch(1), M. Arendt(1)