P. Morfouli

Institut polytechnique de GrenobleFrance

Engineering · Physical Sciences

9h-index344citations77works0.52yr avg

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Research Topics

Advanced MEMS and NEMS Technologies(29), Semiconductor materials and devices(19), Advancements in Semiconductor Devices and Circuit Design(15), Mechanical and Optical Resonators(13), Advanced Sensor and Energy Harvesting Materials(8)

Publications77 total

Microelectronics Reliability·2020· 4 citedOpen Access
Thermal piezoresistive back action enhancement using an innovative design of silicon nanobeam
HAL (Le Centre pour la Communication Scientifique Directe)·2019
Stiffness correction method for improving vibrations immunity of a MEMS tuning fork gyroscope
HAL (Le Centre pour la Communication Scientifique Directe)·2018
Electrical characterization of metal/a-SiC:H/Si MIS capacitors for DNA sensor application
HAL (Le Centre pour la Communication Scientifique Directe)·2018
Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope
HAL (Le Centre pour la Communication Scientifique Directe)·2017
Thermal piezoresistive back action in p-type silicon nanogauges based MEMS
HAL (Le Centre pour la Communication Scientifique Directe)·2017
PiezoNEMS pour les systèmes autonomes : des capteurs aux nanogénérateurs
HAL (Le Centre pour la Communication Scientifique Directe)·2014
Ultra-thin membrane based MEMS and NEMS technologies: actuation, sensing and energy considerations
HAL (Le Centre pour la Communication Scientifique Directe)·2013
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2013· 2 cited
HAL (Le Centre pour la Communication Scientifique Directe)·2013
Innovative SOI based MEMS using large deformation ultra-thin membranes: From micropumps to piezo-NEMS
HAL (Le Centre pour la Communication Scientifique Directe)·2013
PiezoNEMS: new concepts for sensors and energy harvesting devices
HAL (Le Centre pour la Communication Scientifique Directe)·2013
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Frequent Co-authors

L. Montès(19), B. Bercu(11), G. Ghibaudo(6), Christophe Poulain(6), Guillaume Jourdan(6), T. Ouisse(5), J. J. Wortman(5), G. Pananakakis(5), F. Rochette(5), A. Salette(5), W. L. Hill(4), Veena Misra(4), P.K. McLarty(4), Guillaume Pandraud(4), Pierre Janioud(4), Alexandra Koumela(4), R. Lefèvre(4), Eric M. Vogel(3), M. Le Berre(3), Mireille Mouis(3)