S. F. Webb

Auburn University — United States

Engineering · Physical Sciences

4h-index34citations8works0.02yr avg
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Research Topics

Plasma Diagnostics and Applications(7), Particle accelerators and beam dynamics(3), Advanced Chemical Physics Studies(2), Metal and Thin Film Mechanics(2), Diamond and Carbon-based Materials Research(2)

Publications8 total

Role of neutral molecule chemistry in electron cyclotron resonance microwave plasmas capable of diamond deposition
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2006· 2 cited
Determination of the chemical composition of electron cyclotron resonance microwave plasmas suitable for diamond deposition
2000
Supersonic Pulse, Plasma Sampling Mass Spectrometry: Theory and Practice
Plasma Chemistry and Plasma Processing·1999· 4 cited
Investigation of 4% carbon in hydrogen electron cyclotron resonance microwave plasmas using ethane as the source gas
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1999· 4 citedOpen Access
Distribution of species within an ethylene electron cyclotron resonance-microwave plasma
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1998· 4 cited
Mass spectrometric determination of the percent dissociation of a high-density chlorine plasma
Applied Physics Letters·1997· 8 citedOpen Access
Determining the number of chemical steps responsible, for the distribution of molecular species within an electron cyclotron resonance-microwave plasma
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1997· 7 cited
The chemical composition of diamond plasmas
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1996· 5 cited

Frequent Co-authors

Rik Blumenthal(7), G. A. Gaddy(5), Hongbo Zhu(1)