К. А. Воротилов

MIREA - Russian Technological University — Russia

Materials Science · Physical Sciences

22h-index1.6kcitations180works1.42yr avg
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Research Topics

Ferroelectric and Piezoelectric Materials(87), Acoustic Wave Resonator Technologies(41), Copper Interconnects and Reliability(33), Semiconductor materials and devices(31), Microwave Dielectric Ceramics Synthesis(20)

Publications180 total

Phenomenological Analysis of Percolation Phenomena in Porous Low-k Dielectrics
Coatings·2025Open Access
Optical properties of thin-film absorbing capacitive periodic structures in the terahertz range
Applied Optics·2025
Porous Organosilica Films: Is It Possible to Enhance Hydrophobicity While Maintaining Elastic Stiffness?
Polymers·2025Open Access
Phenomenological Analysis of Percolation Phenomena in Porous Low-k Dielectrics
Preprints.org·2025· 1 citedOpen Access
Formation of Mesoporous Thin Titanium Dioxide Films via Molecular Self-Assembly
Nano- i Mikrosistemnaya Tehnika·2025
Investigating the Impact of the Spatial Arrangement of the Terminal Methyl Group Relative to the Bridging Ethylene Group on the Properties of PMO Films
The Journal of Physical Chemistry B·2025· 1 cited
Temperature evolution of pore structure in ferroelectric PZT films prepared by molecular self-assembly
Journal of Advanced Dielectrics·2025· 1 citedOpen Access
Photocurrent in PZT/TiOx composite film prepared via self-assembly of perovskite matrix and ALD of titania
Materials Chemistry and Physics·2024· 1 cited
Improving Mechanical Properties of Porous Organosilica Films by Replacing Si–CH3 with Si(–CH3)2
Preprints.org·2024Open Access
Exploring the Relationship Between Electrical Characteristics and Changes in Chemical Composition and Structure of OSG Low-K Films Under Thermal Annealing
Coatings·2024· 3 citedOpen Access
Exploring the Relationship Between Electrical Characteristics and Changes in Chemical Composition and Structure of OSG Low-k Films under Thermal Annealing
Preprints.org·2024· 1 citedOpen Access
Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films
Polymers·2024· 8 citedOpen Access
Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films
Preprints.org·2024· 5 citedOpen Access
Challenges in scaling of IPVD deposited Ta barriers on OSG low‐<i>k</i> films: Carbonization of Ta by CH<sub><i>x</i></sub> radicals generated through VUV‐induced decomposition of carbon‐containing groups
Plasma Processes and Polymers·2024
Investigating the Impact of the Spatial Arrangement of the Terminal Methyl Group Relative to the Bridging Ethylene Group on the Properties of Pmo Films
SSRN Electronic Journal·2024Open Access
Effect of Surfactant and Solvent on the Pore Structure of Organosilica Glass Film
Russian Microelectronics·2023· 2 cited
Temperature evolution of organosilicate glass films with organic bridges
Microporous and Mesoporous Materials·2023· 3 cited
Porous PZT Films: How Can We Tune Electrical Properties?
Materials·2023· 9 citedOpen Access
Porous PZT Films: How Can We Tune Electrical Properties?
Preprints.org·2023· 3 citedOpen Access
UV-Excited Luminescence in Porous Organosilica Films with Various Organic Components
Nanomaterials·2023· 3 citedOpen Access
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Frequent Co-authors

А. С. Сигов(23), Д. С. Серегин(14), Mikhaı̈l R. Baklanov(9), Alexey S. Vishnevskiy(8), Vladimir Petrovsky(7), M.I. Yanovskaya(7), А. С. Сигов(6), Е. Д. Мишина(6), О. М. Жигалина(6), Vladimir Vasiljev(5), E.P. Turevskaya(4), Yu. V. Podgorny(4), Н. М. Котова(4), Th. Rasing(4), Evguenia Orlova(3), Д. Н. Хмеленин(3), Jihperng Leu(3), Jing Zhang(3), L. I. Solovjeva(3), Seiichiro Nakabayashi(2)