Д. С. Серегин

MIREA - Russian Technological University — Russia

Materials Science · Physical Sciences

13h-index534citations90works0.32yr avg
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Research Topics

Ferroelectric and Piezoelectric Materials(40), Copper Interconnects and Reliability(24), Semiconductor materials and devices(18), Acoustic Wave Resonator Technologies(14), Multiferroics and related materials(12)

Publications90 total

Porous Organosilica Films: Is It Possible to Enhance Hydrophobicity While Maintaining Elastic Stiffness?
Polymers·2025Open Access
Microstructural Evolution and Domain Engineering in Porous PZT Thin Films
Surfaces·2025Open Access
Microstructural Evolution and Domain Engineering in Porous PZT Thin Films
Preprints.org·2025Open Access
Formation of Mesoporous Thin Titanium Dioxide Films via Molecular Self-Assembly
Nano- i Mikrosistemnaya Tehnika·2025
Investigating the Impact of the Spatial Arrangement of the Terminal Methyl Group Relative to the Bridging Ethylene Group on the Properties of PMO Films
The Journal of Physical Chemistry B·2025· 1 cited
Temperature evolution of pore structure in ferroelectric PZT films prepared by molecular self-assembly
Journal of Advanced Dielectrics·2025· 1 citedOpen Access
Photocurrent in PZT/TiOx composite film prepared via self-assembly of perovskite matrix and ALD of titania
Materials Chemistry and Physics·2024· 1 cited
Improving Mechanical Properties of Porous Organosilica Films by Replacing Si–CH3 with Si(–CH3)2
Preprints.org·2024Open Access
Challenges in scaling of IPVD deposited Ta barriers on OSG low‐<i>k</i> films: Carbonization of Ta by CH<sub><i>x</i></sub> radicals generated through VUV‐induced decomposition of carbon‐containing groups
Plasma Processes and Polymers·2024
Investigating the Impact of the Spatial Arrangement of the Terminal Methyl Group Relative to the Bridging Ethylene Group on the Properties of Pmo Films
SSRN Electronic Journal·2024Open Access
Effect of Surfactant and Solvent on the Pore Structure of Organosilica Glass Film
Russian Microelectronics·2023· 2 cited
Temperature evolution of organosilicate glass films with organic bridges
Microporous and Mesoporous Materials·2023· 3 cited
Porous PZT Films: How Can We Tune Electrical Properties?
Materials·2023· 9 citedOpen Access
Porous PZT Films: How Can We Tune Electrical Properties?
Preprints.org·2023· 3 citedOpen Access
Control of Columnar Grain Microstructure in CSD LaNiO3 Films
Molecules·2023· 3 citedOpen Access
СУБТРАКТИВНЫЙ ПРОЦЕСС ФОРМИРОВАНИЯ СИСТЕМЫ МЕТАЛЛИЗАЦИИ
Электронная техника Серия 3 Микроэлектроника·2023
THE SUBTRACTIVE PROCESS OF FORMING A METALLIZATION SYSTEM.
Электронная техника Серия 3 Микроэлектроника·2023
Damage to OSG low‐<i>k</i> films during IPVD deposition of the Ta barrier layer
Plasma Processes and Polymers·2022· 1 cited
Dielectric Barrier in the Subtractive Process of Formation of a Copper Metallization System
Russian Microelectronics·2022· 4 cited
Benzene bridged hybrid organosilicate films with improved stiffness and small pore size
Materials Chemistry and Physics·2022· 8 cited
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Frequent Co-authors

К. А. Воротилов(47), А. С. Сигов(24), Alexey S. Vishnevskiy(20), Mikhaı̈l R. Baklanov(16), Л. А. Делимова(10), G. A. Komandin(9), I. E. Spektor(9), Н. М. Котова(8), O. E. Porodinkov(7), Н. В. Зайцева(7), О. М. Жигалина(5), Д. Н. Хмеленин(5), Askar Rezvanov(5), Georgy A. Orlov(5), Jihperng Leu(4), Jing Zhang(4), А. В. Атанова(4), А. А. Волков(4), Yu. V. Podgorny(3), И. С. Овчинников(3)