И. С. Овчинников

MIREA - Russian Technological University — Russia

Physics and Astronomy · Physical Sciences

3h-index42citations13works0.02yr avg
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Research Topics

Force Microscopy Techniques and Applications(5), Copper Interconnects and Reliability(4), Metal and Thin Film Mechanics(2), Semiconductor materials and devices(2), Advanced Surface Polishing Techniques(2)

Publications13 total

Temperature evolution of organosilicate glass films with organic bridges
Microporous and Mesoporous Materials·2023· 3 cited
Mechanical Properties of Low-k Dielectric Deposited on Subtractively Patterned Cu Lines for Advanced Interconnects
2021· 1 cited
Evaluation methods of mechanical properties for low-k dielectrics
Russian Technological Journal·2021Open Access
Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentation
Langmuir·2020· 29 cited
Mechanical properties of nanoporous organo silicate glass films for the use in integrated circuits interconnects
AIP conference proceedings·2020· 4 cited
Detection of idden defects in low-k dielectrics by atomic force microscopy
Journal of Physics Conference Series·2019· 1 citedOpen Access
Оценка формы ствола и кроны сосны обыкновенной по комплексу морфологических признаков
Лесоведение·2019· 2 cited
Ion-Stimulated Sputtering of the Surface of the Polycrystalline Copper by High-Energy Ions of Gallium
Nano- i Mikrosistemnaya Tehnika·2018
Influence of the Region of Ion-Beam Overlap on the Rate of the Local Ion-Beam Deposition of Platinum from the Gas Phase
Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques·2018
Влияние области перекрытия пучка ионов на скорость локального ионно-лучевого осаждения платины из газовой фазы
Поверхность Рентгеновские синхротронные и нейтронные исследования·2018
Phenomenon of Trunk Twist during the Growth of Woody Plants (Using the Example of Pinus sylvestris L. and Picea obovata Ldb.)
Contemporary Problems of Ecology·2018· 2 cited
Модель локального ионно-лучевого осаждения платины сфокусированным пучком ионов
Russian Technological Journal·2017Open Access
A lower bound for the Dirichlet integral in the mapping of a sphere onto a domain
Siberian Mathematical Journal·1972

Frequent Co-authors

Д. С. Серегин(5), К. А. Воротилов(5), Alexey S. Vishnevskiy(3), Mikhaı̈l R. Baklanov(3), Askar Rezvanov(2), С. А. Шавнин(2), А. А. Монтиле(2), D. G. Lapin(2), Dieter Schneider(1), А. С. Сигов(1), G. A. Orlov(1), Alexandr Sigov(1), Alexander P. Palov(1), Georgy A. Orlov(1), Vladislav A. Yakushev(1), Д. Ю. Голиков(1), D. Yu. Golikov(1), В. А. Галако(1), В. Э. Власенко(1), G Yu Dalskaya(1)