V.P. Jaecklin

Engineering · Physical Sciences

11h-index487citations23works0.02yr avg
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Research Topics

Advanced MEMS and NEMS Technologies(19), Mechanical and Optical Resonators(11), Photonic and Optical Devices(6), Force Microscopy Techniques and Applications(6), Semiconductor Lasers and Optical Devices(3)

Publications23 total

MHz Opto-mechanical Modulator
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95·2005· 7 cited
Optical microshutters and torsional micromirrors for light modulator arrays
2002· 33 citedOpen Access
Influence of surface contamination on metal/metal bond contact quality
Journal of Electronic Materials·1998· 14 cited
Megahertz opto-mechanical modulator
Sensors and Actuators A Physical·1996· 17 citedOpen Access
Megahertz Opto-Mechanical Modulator
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1996
AFM imaging with an xy-micropositioner with integrated tip
Sensors and Actuators A Physical·1995· 47 citedOpen Access
Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling
Sensors and Actuators A Physical·1994· 37 citedOpen Access
Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum
Sensors and Actuators A Physical·1994· 40 citedOpen Access
Line-addressable torsional micromirrors for light modulator arrays
Sensors and Actuators A Physical·1994· 49 citedOpen Access
Line-Addressable Torsional Micromirrors for Light Modulator Arrays
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1994
Surface Micromachined Electrostatic Actuators
1994
Microfabricated tools for nanoscience
Journal of Micromechanics and Microengineering·1993· 11 citedOpen Access
Comb actuators for xy-microstages
Sensors and Actuators A Physical·1993· 33 citedOpen Access
Microsystems Research and Development at IMT Neuchatel - Scanning Probe Microsystem for Nanotechnology
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1993Open Access
Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanned Surface Profiling
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1993· 1 cited
Microsystems Research and Development at IMT Neuchatel - Modelling and Performance of Polysilicon Comb Actuators
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1993Open Access
High-Precision Aligned Silicon Wafer Bonding for a Micromachined AFM Sensor
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1993· 1 citedOpen Access
Light Modulators and Deflectors
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1993Open Access
Micromachined Silicon Tools for Nanometer-Scale Science
1993· 1 citedOpen Access
Microsystems Research and Development at IMT Neuchatel - Optical Microshutters and Torsional Micromirrors
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1993
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Frequent Co-authors

Christian Linder(17), N. F. de Rooij(10), Juergen Brügger(7), J.-M. Moret(6), Ν. F. de Rooij(5), M.-A. Grétillat(4), R. Vuilleumier(4), P.-F. Indermühle(4), C. Marxer(3), R. Baettig(3), O. Anthamatten(3), Peter Vogel(2), Nicolas Blanc(2), D. Briand(2), L. Paratte(1), M. Binggeli(1), Robert Bischof(1), Florian Rudolf(1), P.-F. Indermuehle(1), A. Schneuwly(1)