M. Tuominen

Tampere University — Finland

Engineering · Physical Sciences

20h-index2.0kcitations90works4.02yr avg
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Research Topics

Semiconductor materials and devices(55), Copper Interconnects and Reliability(23), Silicon Carbide Semiconductor Technologies(22), Metal and Thin Film Mechanics(15), Semiconductor materials and interfaces(15)

Publications90 total

Impregnation of granular activated carbon with nickel or copper improves performance of microbial electrosynthesis
Bioresource Technology·2024· 4 citedOpen Access
Nano-analytical investigation of the forming process in an HfO2-based resistive switching memory
Journal of Applied Physics·2021· 6 citedOpen Access
Combining Experimental and DFT Investigation of the Mechanism Involved in Thermal Etching of Titanium Nitride Using Alternate Exposures of NbF<sub>5</sub> and CCl<sub>4</sub>, or CCl<sub>4</sub> Only
Advanced Materials Interfaces·2021· 4 citedOpen Access
Thermal Atomic Layer Etching of Aluminum Oxide (Al<sub>2</sub>O<sub>3</sub>) Using Sequential Exposures of Niobium Pentafluoride (NbF<sub>5</sub>) and Carbon Tetrachloride (CCl<sub>4</sub>): A Combined Experimental and Density Functional Theory Study of the Etch Mechanism
Chemistry of Materials·2021· 14 citedOpen Access
Thermal gas-phase etching of titanium nitride (TiN) by thionyl chloride (SOCl2)
Applied Surface Science·2020· 7 citedOpen Access
Improvement of HRS Variability in OxRRAM by Tailored Metallic Liner
arXiv (Cornell University)·2020Open Access
Improvement of HRS Variability in OxRRAM by Tailored Metallic Liner
Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials·2019Open Access
A-ryhmän streptokokin aiheuttama tautitaakka Varsinais-Suomen alueella
UTUPub (University of Turku)·2018
Tribological properties of thin films made by atomic layer deposition sliding against silicon
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2017· 10 citedOpen Access
TiF <sub>3</sub> :TiN nanocomposite thin films – a novel transparent conductor system
Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics·2017
Histamine H3 Receptor Regulates Sensorimotor Gating and Dopaminergic Signaling in the Striatum
Journal of Pharmacology and Experimental Therapeutics·2016· 38 cited
Tribological properties of atomic layer deposited thin films against silicon
2016
Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2015· 35 citedOpen Access
Nickel silicide for source-drain contacts from ALD NiO films
2015· 3 cited
Cost Effective Fabrication of Oriented Magnetic Thin Films With Large In-plane Uniaxial Anisotropy with Enhanced Energy Product by Nanoimprint Lithography
2014
Comparison of spin response in Alq3 and Co-pthalocyanin based organic spin valves
SPIN·2014
Mechanical properties of ALD TiN films made from TiCl4 and NH3
2014
Titanium nitride by atomic layer deposition: mechanical properties
2014
Thermo-acoustic Engine for Electricity Production
2014
Multi-player tactical role playing game with a Java server and an Android client
Tampere University Institutional Repository (Tampere University)·2012Open Access
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Frequent Co-authors

Erik Janzén(18), Suvi Haukka(14), E. Tois(10), Rositza Yakimova(9), Rositsa Yakimova(8), Mikael Syväjärvi(6), E. Vainonen-Ahlgren(6), Anne Henry(5), Tom Blomberg(5), Thierry Conard(4), Wilfried Vandervorst(4), Marc Heyns(4), A. Ellison(4), T. Tuomi(4), Depei Wu(4), Mikael Östling(4), E. Prieur(4), Jaakko Tuomilehto(4), Mikko Ritala(4), W.F.A. Besling(3)