Steven M. Smith

Motorola (United States) — United States

Engineering · Physical Sciences

4h-index400citations7works0.02yr avg
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Research Topics

Semiconductor materials and devices(5), Thin-Film Transistor Technologies(3), Advancements in Semiconductor Devices and Circuit Design(2), T-cell and B-cell Immunology(1), Tuberculosis Research and Epidemiology(1)

Publications7 total

Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry
Thin Solid Films·2008· 305 cited
Improved adhesion of photoresist to III-V substrates using PECVD carbon films
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2002
Decreased IFN- γ and increased IL-4 production by human CD8+ T cells in response toMycobacterium tuberculosis in tuberculosis patients
Tuberculosis·2002· 57 cited
Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1999· 22 cited
Uniform low stress oxynitride films for application as hardmasks on x-ray masks
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1997· 14 cited
Effects of SC-1 Dilution and Temperature Variations on Etch Rate and Surface Haze
MRS Proceedings·1995· 2 cited
Transfer-Appropriate Patterns of Blocking
PsycEXTRA Dataset·1994

Frequent Co-authors

Harland G. Tompkins(3), Douglas J. Resnick(2), James N. Hilfiker(1), Neha Singh(1), Tom Tiwald(1), Diana Convey(1), Jeffrey H. Baker(1), Michèl R. Klein(1), Adam Malin(1), Jainaba Sillah(1), Keith P. W. J. McAdam(1), Hazel M. Dockrell(1), R. B. Gregory(1), Paul W. Deal(1), William J. Dauksher(1), S. V. Pendharkar(1), K. D. Cummings(1), P. A. Seese(1), Pawitter J. S. Mangat(1), Jeong Chan(1)