Sergiy Yulin

Fraunhofer Institute for Applied Optics and Precision Engineering — Germany

Engineering · Physical Sciences

13h-index527citations49works0.52yr avg
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Research Topics

Advancements in Photolithography Techniques(17), Optical Coatings and Gratings(12), Electron and X-Ray Spectroscopy Techniques(12), Advanced Surface Polishing Techniques(9), Advanced X-ray Imaging Techniques(7)

Publications49 total

W/Si Multilayer Mirrors for Soft X-Ray Wavelengths < 2.4 nm
Surfaces·2025· 1 citedOpen Access
The Second Harmonic Generation in the ABC-type Metamaterials
2025
The COMIX polarimeter: a compact device for XUV polarization analysis
Journal of Synchrotron Radiation·2022· 4 citedOpen Access
Coatings with barrier layers for extreme‐short wavelengths
Vakuum in Forschung und Praxis·2021· 9 cited
Towards attosecond imaging at the nanoscale using broadband holography-assisted coherent imaging in the extreme ultraviolet
Communications Physics·2021· 17 citedOpen Access
Material-specific imaging of nanolayers using extreme ultraviolet coherence tomography
Optica·2020· 24 citedOpen Access
Broadband holography-assisted coherent imaging -- towards attosecond imaging at the nanoscale
arXiv (Cornell University)·2020Open Access
Nanoscale Fourier transform holography beyond the temporal coherence limit
arXiv (Cornell University)·2020Open Access
Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications
Thin Solid Films·2017· 7 cited
Interface characterization in B-based multilayer mirrors for next generation lithography
Thin Solid Films·2016· 10 cited
Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering
2016· 1 cited
La/B_4C multilayer mirrors with an additional wavelength suppression
Optics Express·2015· 21 citedOpen Access
Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser
Applied Optics·2014· 10 cited
Optical properties of unprotected and protected sputtered silver films: Surface morphology vs. UV/VIS reflectance
Advanced Optical Technologies·2013· 39 cited
Lifetime and refurbishment of multilayer LPP collector mirrors
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2013· 13 cited
Optical reflector coatings for astronomical applications from EUV to IR
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2012· 12 cited
Optical performance of LPP multilayer collector mirrors
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2012· 6 cited
Optical and structural properties of Nb2O5–SiO2 mixtures in thin films
Surface and Coatings Technology·2012· 15 citedOpen Access
Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2011· 2 cited
Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Journal of Applied Physics·2011· 6 citedOpen Access
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Frequent Co-authors

Norbert Kaiser(36), Torsten Feigl(32), Nicolas Benoît(12), Andreas Tünnermann(9), Mark Schürmann(5), Marco Perske(5), Angela Duparré(4), Hagen Pauer(4), N. Böwering(4), Marcus Trost(4), Franz Schaefers(3), Philipp Naujok(3), Thomas Kuhlmann(3), Wilhelm Eschen(3), Sici Wang(3), Michael Steinert(3), Heide Meißner(3), Michael Bußmann(3), Thomas Pertsch(3), Jens Limpert(3)