Takashi Ide

Renesas Electronics (Japan)Japan

Materials Science · Physical Sciences

10h-index367citations75works0.02yr avg

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Research Topics

Diamond and Carbon-based Materials Research(10), Semiconductor materials and devices(9), Force Microscopy Techniques and Applications(8), Ion-surface interactions and analysis(8), Advanced Surface Polishing Techniques(6)

Publications73 total

IEEE Transactions on Semiconductor Manufacturing·2020· 6 cited
Highly Reliable Ferroelectric Hf0.5Zr0.5O2 Film with Al Nanoclusters Embedded by Sub-Monolayer Doping Technique
IEICE Technical Report; IEICE Tech. Rep.·2019
Polymer International·2018· 10 citedOpen Access
Effect of carbon on boron clustering and diffusion in silicon studied by atom probe tomography
The Japan Society of Applied Physics·2017
Hydrogen Distribution Analysis in Al 2 O 3 Film -Dependence of Annealing Temperature-
The Japan Society of Applied Physics·2016
High resolution secondary ion mass spectrometry analysis of hydrogen behavior in SiO
Japanese Journal of Applied Physics·2014
The Cambridge Structural Database·2013Open Access
IEEE International Reliability Physics Symposium proceedings·2009· 4 cited
Interface Structure of Tunnel Oxynitride for Flash Memory Studied by Hard X-ray Photoelectron Spectroscopy
2004· 1 cited
Journal of the Japan Society for Precision Engineering·2003· 1 citedOpen Access
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Frequent Co-authors

Yuzo Mori(9), Katsuyoshi Endo(8), Yuzo Mori(8), Hidetsugu Yagi(8), Hiromichi Toyota(6), Yorinobu Kunimune(4), Kikuji Hirose(4), Naoya Ikawa(4), K. Shimizu(3), Kazuto Yamauchi(3), Muneharu Komori(3), Kazuya Makiyama(3), Kohei Hara(3), Masuho Haraguchi(3), Hidekazu Goto(3), Kazuto Yamauchi(2), Akira Sakai(2), Yusuke Sakurai(2), Masao Inoue(2), Akio Nishida(2)