N. Sadeghi

Jahrom University of Medical SciencesIR

Engineering · Physical Sciences

37h-index4.1kcitations205works2.02yr avg

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Research Topics

Plasma Diagnostics and Applications(123), Laser-induced spectroscopy and plasma(37), Semiconductor materials and devices(36), Plasma Applications and Diagnostics(34), Spectroscopy and Laser Applications(29)

Publications205 total

Cycling process in remote plasma source for selective etching with nanometric control
HAL (Le Centre pour la Communication Scientifique Directe)·2021
Journal of Quantitative Spectroscopy and Radiative Transfer·2020· 6 cited
Ultra-fast dynamics of a pulsed microwave surface wave discharge in argon
MPG.PuRe (Max Planck Society)·2019
Real time monitoring of NF3, NH3 and HF densities in the downstream of a soft-etch reactor by VUV Broad-Band absorption spectroscopy
HAL (Le Centre pour la Communication Scientifique Directe)·2017
Real-time monitoring of reactive species in downstream etch reactor by VUV broad-band absorption spectroscopy
Bulletin of the American Physical Society·2016
Dynamics of the formation and loss of boron atoms in a H$_2$/B$_2$H$_6$ microwave plasma
Bulletin of the American Physical Society·2016
Influence of excitation frequency on helium metastable density in atmospheric pressure DBD
APS Annual Gaseous Electronics Meeting Abstracts·2016
Journal of Physics Conference Series·2016Open Access
Measuring IVDF through high−aspect holes in pulsed ICP plasmas
HAL (Le Centre pour la Communication Scientifique Directe)·2015
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Frequent Co-authors

G. Cunge(12), O. Joubert(7), Jean‐Paul Booth(5), R. Ramos(5), Jacques Derouard(5), D. W. Setser(4), Stéphane Mazouffre(4), M. Touzeau(4), Corinne Foissac(3), Philippe Supiot(3), T. D. Nguyen(3), D. Vempaire(3), Gilles Cunge(3), M. Kogelschatz(3), A. Kachanov(2), Uwe Czarnetzki(2), P. Vankan(2), R. Engeln(2), Damien Gawron(2), L. Vallier(2)