Fang-Sung Cheng

National Taiwan UniversityTaiwan

Engineering · Physical Sciences

5h-index133citations13works0.02yr avg

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Research Topics

Nanofabrication and Lithography Techniques(7), Advanced Surface Polishing Techniques(5), Microstructure and Mechanical Properties of Steels(4), Advancements in Photolithography Techniques(4), Metallurgy and Material Forming(3)

Publications13 total

Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture·2015· 5 cited
Materials and Manufacturing Processes·2015· 2 cited
Materials Research Innovations·2014· 2 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2008· 11 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2006· 21 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2005· 50 cited

Frequent Co-authors

Sen‐Yeu Yang(5), Lon A. Wang(2), Jer-Haur Chang(1), Chi-Chung Chao(1), Yung-Chun Weng(1), Sen-Yeu Yang(1), Shuwen Xu(1), Po‐Hsun Huang(1), Tzu-Chien Huang(1), Shih‐Chih Nian(1), Chien‐Chang Chen(1), Albert Wen‐Jeng Hsue(1), Yu Cheng(1), Keng-Tu Hsu(1), Y. S. Chen(1), Shao‐Yu Tsai(1), Yinji Chen(1), Kuang–Chao Fan(1), Yihanzi Liu(1), P.-Y. Huang(1)