National Taiwan University — Taiwan
Engineering · Physical Sciences
5h-index133citations13works0.02yr avg
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Research Topics
Nanofabrication and Lithography Techniques(7), Advanced Surface Polishing Techniques(5), Microstructure and Mechanical Properties of Steels(4), Advancements in Photolithography Techniques(4), Metallurgy and Material Forming(3)
Publications13 total
Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture·2015· 5 cited
Materials and Manufacturing Processes·2015· 2 cited
Materials Research Innovations·2014· 2 cited
Materials Research Innovations·2014· 2 cited
Advanced Science Letters·2012· 3 cited
International Polymer Processing·2008
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2008· 11 cited
Microelectronic Engineering·2007· 37 cited
Key engineering materials·2007
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2006· 21 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2005· 50 cited
Frequent Co-authors
Sen‐Yeu Yang(5), Lon A. Wang(2), Jer-Haur Chang(1), Chi-Chung Chao(1), Yung-Chun Weng(1), Sen-Yeu Yang(1), Shuwen Xu(1), Po‐Hsun Huang(1), Tzu-Chien Huang(1), Shih‐Chih Nian(1), Chien‐Chang Chen(1), Albert Wen‐Jeng Hsue(1), Yu Cheng(1), Keng-Tu Hsu(1), Y. S. Chen(1), Shao‐Yu Tsai(1), Yinji Chen(1), Kuang–Chao Fan(1), Yihanzi Liu(1), P.-Y. Huang(1)