Jer-Haur Chang

National Taiwan UniversityTaiwan

Engineering · Physical Sciences

4h-index117citations8works0.02yr avg

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Research Topics

Nanofabrication and Lithography Techniques(5), Advanced MEMS and NEMS Technologies(2), Microfluidic and Capillary Electrophoresis Applications(2), Additive Manufacturing and 3D Printing Technologies(2), Advanced Surface Polishing Techniques(2)

Publications8 total

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2009· 9 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 2 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2008· 38 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2005· 50 cited

Frequent Co-authors

Lon A. Wang(5), Yung-Pin Chen(3), Sen‐Yeu Yang(2), Shih‐Jung Liu(2), Fang-Sung Cheng(1), Chi-Chung Chao(1), Yung-Chun Weng(1), Yuet-Ping Lee(1), Cheng-Hung Chen(1), Hsin-Chieh Chiu(1), Guan‐Yu Chen(1), Chieh-Hsiu Chiang(1), Lien-Sheng Chen(1), Ching-Tung Tseng(1), Chih‐Hsien Lee(1), Jia‐Yush Yen(1), Chao-Te Lee(1), Chih‐Yu Huang(1), Wen-Lin Chan(1), Shih-Min Chuo(1)