National Taiwan University — Taiwan
Engineering · Physical Sciences
4h-index117citations8works0.02yr avg
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Research Topics
Nanofabrication and Lithography Techniques(5), Advanced MEMS and NEMS Technologies(2), Microfluidic and Capillary Electrophoresis Applications(2), Additive Manufacturing and 3D Printing Technologies(2), Advanced Surface Polishing Techniques(2)
Publications8 total
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2009· 9 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 2 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2008· 38 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2005· 50 cited
Elsevier eBooks·2001
Journal of Reinforced Plastics and Composites·2000· 13 cited
Frequent Co-authors
Lon A. Wang(5), Yung-Pin Chen(3), Sen‐Yeu Yang(2), Shih‐Jung Liu(2), Fang-Sung Cheng(1), Chi-Chung Chao(1), Yung-Chun Weng(1), Yuet-Ping Lee(1), Cheng-Hung Chen(1), Hsin-Chieh Chiu(1), Guan‐Yu Chen(1), Chieh-Hsiu Chiang(1), Lien-Sheng Chen(1), Ching-Tung Tseng(1), Chih‐Hsien Lee(1), Jia‐Yush Yen(1), Chao-Te Lee(1), Chih‐Yu Huang(1), Wen-Lin Chan(1), Shih-Min Chuo(1)