Alexey Y. Kovalgin

Institute of Nanotechnology — United Kingdom

Engineering · Physical Sciences

20h-index1.4kcitations148works1.32yr avg
OpenAlex↗ORCID↗Google Scholar↗Lab page↗

Accepting Students?

No reports yet. Know if this professor is taking students?

Research Topics

Semiconductor materials and devices(71), Thin-Film Transistor Technologies(30), Metal and Thin Film Mechanics(23), GaN-based semiconductor devices and materials(19), Silicon Nanostructures and Photoluminescence(17)

Publications148 total

Creating Nanopores by Calcination of Titanicone Layers Grown by Atmospheric-Pressure Molecular Layer Deposition, for Application in Ceramic Nanofiltration Membranes
ECS Meeting Abstracts·2025
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride
ACS Omega·2025Open Access
Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe<sub>3</sub>
The Journal of Physical Chemistry C·2025
Influence of calcination temperature on the physicochemical properties of atomic/molecular layer deposited hybrid inorganic/organic ceramic nanofiltration membranes
Open Ceramics·2025· 1 citedOpen Access
Monitoring the thickness of white Sn thin island films by spectroscopic ellipsometry
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025Open Access
Ceramic Nanofiltration Membranes: Creating Nanopores by Calcination of Atmospheric-Pressure Molecular Layer Deposition Grown Titanicone Layers
Membranes·2025· 1 citedOpen Access
Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025Open Access
Increasing hydrophobicity of ceramic membranes by post-deposition nitrogen annealing of molecular layer deposition grown hybrid layers
Applied Surface Science·2024· 4 citedOpen Access
Electrical behavior of ALD-molybdenum films in the thin-film limit
2024Open Access
Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing
Separations·2024· 7 citedOpen Access
Low-resistivity molybdenum obtained by atomic layer deposition
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2023· 13 citedOpen Access
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride
The Journal of Physical Chemistry C·2023· 8 citedOpen Access
Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition
AIP Advances·2023Open Access
Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials
Dalton Transactions·2023· 24 citedOpen Access
Li intercalation into multilayer graphene with controlled defect densities
Carbon Trends·2021· 8 citedOpen Access
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films
Thin Solid Films·2020· 10 citedOpen Access
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2020· 5 cited
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2020· 7 citedOpen Access
Conduction and Electric Field Effect in Ultra-Thin Tungsten Films
IEEE Transactions on Semiconductor Manufacturing·2020· 3 citedOpen Access
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride
The Journal of Physical Chemistry C·2019· 33 citedOpen Access
page 1 of 8Next →

Frequent Co-authors

Antonius A. I. Aarnink(21), Jurriaan Schmitz(21), R.A.M. Wolters(20), Hao Van Bui(12), J. Holleman(11), M. P. de Jong(9), A. Boogaard(8), F. B. Wiggers(6), Ihor Brunets(6), Sourish Banerjee(5), Mengdi Yang(5), N. Stavitski(4), D. J. Gravesteijn(4), Yukiko Yamada‐Takamura(4), M.J.H. van Dal(3), R. Friedlein(3), A. Lauwers(2), C. Vrancken(2), Minh D. Nguyen(2), Ramazan O. Apaydin(2)