Gregg A. Barnes

United Microelectronics (United States) — United States

Engineering · Physical Sciences

1h-index5citations3works0.02yr avg
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Research Topics

Advanced Surface Polishing Techniques(2), Advancements in Photolithography Techniques(2), Optical Coatings and Gratings(2), Thin-Film Transistor Technologies(1), Silicon and Solar Cell Technologies(1)

Publications3 total

Considerations for the use of application-specific photoresists
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999
Anti‐reflective coating for deep UV lithography process enhancement
Polymer Engineering and Science·1992· 4 cited
Enhancement of deep-UV patterning integrity and process control using antireflective coating
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1992· 1 cited

Frequent Co-authors

Tony D. Flaim(2), Susan K. Jones(2), Bruce W. Dudley(2), David Koester(2), Charles R. Peters(2), Stephen M. Bobbio(1), James E. Lamb(1), John L. Sturtevant(1), Benjamin C. P. Ho(1), Kevin Lucas(1), John S. Petersen(1), Chris A. Mack(1), Edward W. Charrier(1), William C. Peterson(1), Nobu Koshiba(1)