Siemens Healthcare (United States) — United States
Engineering · Physical Sciences
1h-index5citations1works0.02yr avg
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Research Topics
Semiconductor materials and devices(1), Ion-surface interactions and analysis(1), Integrated Circuits and Semiconductor Failure Analysis(1)
Publications1 total
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1999· 5 cited
Frequent Co-authors
C. Parks(1), H. Glawischnig(1), Morgan S. Levy(1), R. Stengl(1)