H. Glawischnig

Engineering · Physical Sciences

7h-index605citations25works0.02yr avg
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Research Topics

Integrated Circuits and Semiconductor Failure Analysis(12), Semiconductor materials and devices(9), Ion-surface interactions and analysis(9), Silicon and Solar Cell Technologies(7), Semiconductor materials and interfaces(5)

Publications25 total

The continents : concerto for jazz quintet & chamber orchestra
Deutsche Grammophon , Marketed & distributed by Universal Music eBooks·2012· 1 cited
Manufacturing science in ion implantation
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)·2003
Junction capacitance reduction by S/D junction compensation implant
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)·2003· 4 cited
SIMS and modeling of ion implants into photoresist
2002· 5 cited
Low dose ion implantation characterization for Vt control
2002· 5 cited
ION IMPLANTATION TECHNOLOGY-2000
2000· 32 cited
Secondary ion mass spectrometry of deep trench capacitors in dynamic random access memory
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1999· 5 cited
Evaluation of barriers for B and P diffusion into As-doped polysilicon
Thin Solid Films·1996· 3 cited
Influence of structure process flow and high current implantation on gate oxide degradation
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms·1989
Paperless datalogger: Concept and realization for an implanter
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms·1989
Round-robin “ion-implanter and 4-point probes”
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms·1989· 1 cited
Charging studies in applied materials precision implant 9000 system
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms·1987· 7 cited
ION IMPLANTATION SYSTEM CONCEPTS
Elsevier eBooks·1984· 5 cited
Summary of the Fourth International Conference on Ion Implantation: Equipment and Techniques
IEEE Transactions on Nuclear Science·1983
On-Line Control of Production Ion Implanters Using Standard Desk Computers
1983· 1 cited
Ion Implantation: Equipment and Techniques
1983· 136 cited
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
1983· 1 cited
Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
1982· 4 cited
Ion Implantation Techniques
1982· 353 cited
Ion Implantation System Concepts
1982· 8 cited
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Frequent Co-authors

H. Ryssel(6), C. Parks(3), Techniques(2), Reinhard Ploß(2), L. Frey(1), J. Gyulai(1), E. W. Haas(1), G. Lichti(1), A. Bleier(1), K. Hoerschelmann(1), W. Holtschmmidt(1), W. Wenzig(1), James M. Hall(1), W. Holtschmidt(1), Morgan S. Levy(1), R. Stengl(1), Chr. Dieseldorff(1), Klaus Noack(1), A. P. Short(1), Kavita Bala(1)