C. Leung

Applied Materials (United States) — United States

Engineering · Physical Sciences

5h-index160citations9works0.02yr avg
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Research Topics

Advanced Semiconductor Detectors and Materials(4), Semiconductor Quantum Structures and Devices(2), Metal and Thin Film Mechanics(2), Chalcogenide Semiconductor Thin Films(2), Thin-Film Transistor Technologies(2)

Publications9 total

Integrated deposition and etchback of tungsten in a multi-chamber, single-wafer system
2002
Response surface modeling of high pressure chemical vapor deposited blanket tungsten
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1991· 9 cited
Scanning UV Laser Removal of Contaminants from Semiconductor and Optical Surfaces
1991· 3 cited
Effects of substrate polishing on double-heterostructure Al<i>y</i>Ga1−<i>y</i>As-Al<i>x</i>Ga1−<i>x</i>As lasers grown by molecular beam expitaxy
Journal of Applied Physics·1985· 4 cited
Overview of microstructural defect development in interfacial regions of HgCdTe and CdTe layers grown on CdTe and alternate substrates
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1985· 25 cited
Summary Abstract: Growth of high quality (100)CdTe films on (100)GaAs substrates by molecular beam epitaxy
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena·1984· 12 cited
Characteristics of the material improvement process for silicon on sapphire by solid phase epitaxial regrowth
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1984· 8 cited
Growth of (100)CdTe films of high structural perfection on (100)GaAs substrates by molecular beam epitaxy
Applied Physics Letters·1984· 99 cited
Metal-semiconductor reaction phenomena and microstructural investigations of laser induced regrowth of silicon on insulators
Defense Technical Information Center (DTIC)·1981

Frequent Co-authors

T. J. Magee(7), H. Kawayoshi(3), R. N. Bicknell(2), R. W. Yanka(2), J. F. Schetzina(2), G. R. Woolhouse(2), R. Ormond(2), N. C. Giles(1), N. C. Giles‐Taylor(1), H. Kawayoski(1), Thomas E. Clark(1), Mei Chang(1), Eliezer Dovid Richmond(1), A.R. Knudson(1), P. J. Caldwell(1), W. D. Laidig(1), Y. F. Lin(1), C. K. Peng(1), T.E. Clark(1), Paul E. Riley(1)