Hisashi Nakagawa

Minamiaoyama Eye Clinic — Japan

Physics and Astronomy · Physical Sciences

15h-index621citations56works0.02yr avg
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Research Topics

Quantum, superfluid, helium dynamics(17), Advancements in Photolithography Techniques(14), Atomic and Subatomic Physics Research(13), Integrated Circuits and Semiconductor Failure Analysis(13), Advanced Surface Polishing Techniques(9)

Publications56 total

Diagnostic Performance of a Silver-Amplified vs. a Non-Amplified Lateral Flow Kit for Adenoviral Conjunctivitis: A Multicenter Prospective Study
Viruses·2025Open Access
Heat exchange performance of sintered fine silver powders in ultra-low temperature cooling of superfluid 4He
Cryogenics·2023· 1 cited
Heat Exchange Performance of Sintered Fine Silver Powders in Ultra-Low Temperature Cooling of Superfluid 4he
SSRN Electronic Journal·2023· 1 citedOpen Access
Multicenter prospective observational study of fungal keratitis in Japan: analyses of in vitro susceptibility tests for combinations of drugs
Japanese Journal of Ophthalmology·2022· 6 cited
Gas adsorption, thermal and structural properties of sinters made of fine silver powder for ultra-low-temperature heat exchangers
Cryogenics·2019· 10 cited
Start-up performance and pattern defectivity improvement using 2nm rated nylon filter developed with lithography filtration expertise
2019· 2 cited
Constructing a robust PSCARTM process for EUV (Conference Presentation)
2018
EUV resist sensitization and roughness improvement by PSCAR with in-line flood exposure system (Conference Presentation)
2018· 1 cited
EUVのためのロバストなPSCARプロセスの構築【JST・京大機械翻訳】
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2018
Novel EUV photoresist for sub-7nm node (Conference Presentation)
2017· 3 cited
Simulation and experimentation of PSCAR chemistry for complex structures
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2017· 9 cited
Photosensitized Chemically Amplified Resist (PSCAR) 2.0 for high-throughput and high-resolution EUV lithography: dual photosensitization of acid generation and quencher decomposition by flood exposure
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2017· 8 cited
Realization of PLTS-2000 for Low-Temperature Resistance Thermometer Calibration Services Below 650 mK
International Journal of Thermophysics·2016· 2 cited
Sensitivity enhancement of chemically amplified resists and performance study using extreme ultraviolet interference lithography
Journal of Micro/Nanolithography MEMS and MOEMS·2016· 21 citedOpen Access
Novel high sensitivity EUV photoresist for sub-7nm node
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 18 citedOpen Access
Sensitivity enhancement of chemically amplified resists and performance study using EUV interference lithography
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 9 citedOpen Access
Novel metal containing resists for EUV lithography extendibility
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 12 cited
Challenge toward breakage of RLS trade-off for EUV lithography by Photosensitized Chemically Amplified Resist (PSCAR) with flood exposure
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 17 citedOpen Access
Novel High Sensitivity EUV Photoresist for Sub-7 nm Node
Journal of Photopolymer Science and Technology·2016· 16 citedOpen Access
Development of high quantum efficiency superconducting transition edge sensor with self-alignment structure for optical fiber
IEICE Technical Report; IEICE Tech. Rep.·2015
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Frequent Co-authors

Takehiko Naruoka(15), H. Yano(14), Osamu Ishikawa(14), Tomoki Nagai(14), K. Obara(11), Tohru Hata(11), Seiji Nagahara(10), Gosuke Shiraishi(10), Yukie Minekawa(10), Akihiro Oshima(10), Seiichi Tagawa(9), Kosuke Yoshihara(9), Masafumi Hori(7), Satoshi Dei(7), Ryusuke Kado(7), Elizabeth Buitrago(6), Yasin Ekinci(6), W. Behrens‐Baumann(6), Oktay Yildirim(5), Marieke Meeuwissen(5)