Hitachi (Japan) — Japan
Engineering · Physical Sciences
1h-index6citations3works0.02yr avg
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Research Topics
Advanced Surface Polishing Techniques(3), Diamond and Carbon-based Materials Research(2), Copper Interconnects and Reliability(2), Advanced ceramic materials synthesis(1), Nanofabrication and Lithography Techniques(1)
Publications3 total
Japanese Journal of Applied Physics·2012· 1 cited
Japanese Journal of Applied Physics·2012· 5 cited
Scratch-free dielectric CMP slurry with 5-nm colloidal ceria abrasive
Symposium on VLSI Technology·2006
Frequent Co-authors
Daisuke Ryuzaki(3), Naoyuki Koyama(3), Haruaki Sakurai(3), Toranosuke Ashizawa(3), Yosuke Hoshi(2), Yutaro Hoshi(1)