Marc J. M. Merkx

Eindhoven University of Technology — Netherlands

Engineering · Physical Sciences

11h-index1.0kcitations19works11.42yr avg
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Research Topics

Semiconductor materials and devices(16), Electronic and Structural Properties of Oxides(9), Ferroelectric and Negative Capacitance Devices(6), Copper Interconnects and Reliability(5), Catalytic Processes in Materials Science(3)

Publications19 total

Area-Selective Atomic Layer Deposition through Selective Passivation of SiO<sub>2</sub> with a SF<sub>6</sub>/H<sub>2</sub> Plasma
Chemistry of Materials·2025· 1 citedOpen Access
Investigation of the atomic layer etching mechanism for Al<sub>2</sub>O<sub>3</sub> using hexafluoroacetylacetone and H<sub>2</sub> plasma
Journal of Materials Chemistry C·2024· 11 citedOpen Access
The Consequences of Random Sequential Adsorption for the Precursor Packing and Growth-Per-Cycle of Atomic Layer Deposition Processes
The Journal of Physical Chemistry Letters·2024· 8 citedOpen Access
<i>In situ</i> formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN
The Journal of Chemical Physics·2024· 11 citedOpen Access
Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
Applied Surface Science·2024· 26 citedOpen Access
Ultrathin superconducting TaCxN1−x films prepared by plasma-enhanced atomic layer deposition with ion-energy control
Applied Physics Letters·2023· 9 citedOpen Access
Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor
Langmuir·2023· 24 citedOpen Access
Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2022· 26 citedOpen Access
Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors
The Journal of Physical Chemistry C·2022· 51 citedOpen Access
Dependence of inherent selective atomic layer deposition of FeOx on Pt nanoparticles on the coreactant and temperature
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2020· 7 citedOpen Access
Insight into the removal and reapplication of small inhibitor molecules during area-selective atomic layer deposition of SiO2
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2020· 29 citedOpen Access
Nanoscale Encapsulation of Perovskite Nanocrystal Luminescent Films via Plasma-Enhanced SiO<sub>2</sub> Atomic Layer Deposition
ACS Applied Materials & Interfaces·2020· 33 citedOpen Access
Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity
Chemistry of Materials·2020· 68 citedOpen Access
Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics
Data Archiving and Networked Services (DANS)·2020· 1 citedOpen Access
Area-Selective Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> Nanolayers
ACS Materials Letters·2020· 76 citedOpen Access
Mechanism of Precursor Blocking by Acetylacetone Inhibitor Molecules during Area-Selective Atomic Layer Deposition of SiO<sub>2</sub>
Chemistry of Materials·2020· 64 citedOpen Access
From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity
Chemistry of Materials·2018· 391 citedOpen Access
Area-Selective Atomic Layer Deposition of SiO<sub>2</sub> Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
ACS Nano·2017· 186 citedOpen Access
When and why are streamers attracted to dielectric surfaces?
2016

Frequent Co-authors

Adriaan J. M. Mackus(17), W. M. M. Kessels(17), Tania E. Sandoval(8), Ilker Tezsevin(7), Dennis M. Hausmann(4), Alfredo Mameli(3), Marcel A. Verheijen(3), Paul C. Lemaire(3), Joris Maas(3), Jun Li(2), Kashish Sharma(2), Yao Jing(2), Jiaming Cai(2), Kun Cao(2), Rong Chen(2), Pengmei Yu(2), Rik J. Lengers(2), Nicholas J. Chittock(2), Harm C. M. Knoops(2), Bora Karasulu(1)