Uppsala University — Sweden
Engineering · Physical Sciences
8h-index484citations33works0.02yr avg
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Research Topics
Advancements in Semiconductor Devices and Circuit Design(17), Semiconductor materials and interfaces(10), Semiconductor materials and devices(6), Advanced Surface Polishing Techniques(6), Advanced MEMS and NEMS Technologies(5)
Publications33 total
Journal of environmental chemical engineering·2025
Advanced Optical Materials·2021· 19 cited
Biomedical Microdevices·2002· 5 cited
Journal of The Electrochemical Society·1991· 2 cited
Investigation of wafer bonding with BPSG surfaces
1991· 1 cited
Sensors and Actuators A Physical·1990· 3 cited
Journal of Applied Physics·1990· 2 cited
Journal of Applied Physics·1990· 61 citedOpen Access
Silicon-silicon direct bonding, a comparative study on bond strengths
1990
Solid-State Electronics·1989· 10 cited
Solid-State Electronics·1989· 13 cited
Solid-State Electronics·1989
Sensors and Actuators·1989· 60 cited
Electronics Letters·1989· 4 cited
Investigations on silicon microelectronic and micromechanic devices
1989
Sensors and Actuators·1989· 43 cited
Perpendicular walls fabricated in -oriented silicon by anisotropic wet etching
Sensors and Materials·1989· 5 cited
Journal of Applied Physics·1988· 225 cited
A study of the transconductance in MES-transistors on bulk silicon
1988
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Frequent Co-authors
Ulf Magnusson(17), M. Rosling(10), K Bohlin(10), H. Norde(9), JO Nylander(7), Anders Söderbärg(7), L Tenerz(6), H. Bleichner(6), PA Tove(5), Bertil Hök(4), Ferenc Masszi(4), P.A. Tove(3), Ylva Bäcklund(3), Ö. Grelsson(3), B. G. Svensson(2), Y. Lindén(2), Vijay Kumar Sharma(2), Hilmi Volkan Demir(2), S. Berg(2), J. O'Connel(2)