Markku Ylilammi

Espoo Music Institute — Finland

Engineering · Physical Sciences

15h-index1.4kcitations67works0.02yr avg
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Research Topics

Acoustic Wave Resonator Technologies(24), Semiconductor materials and devices(15), Mechanical and Optical Resonators(13), Catalytic Processes in Materials Science(9), Ultrasonics and Acoustic Wave Propagation(7)

Publications67 total

Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
2020Open Access
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
2020Open Access
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
2020· 4 citedOpen Access
Conformality in Aluminum Oxide ALD Process Analyzed using 3rd Generation Silicon Based Lateral High Aspect Ratio Test Structures
2020
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
2020Open Access
Saturation Profile Based Conformality Analysis for Atomic Layer Deposition: Aluminum Oxide in Lateral High-Aspect-Ratio Channels
2020Open Access
Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels
Physical Chemistry Chemical Physics·2020· 34 citedOpen Access
Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates
2019
Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures
2019
Laterally Acoustically Coupled BAW Filters at 3.6 GHz
2018· 5 cited
Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
2018
Modeling growth kinetics of thin films made by atomic layer deposition in lateral high-aspect-ratio structures
Journal of Applied Physics·2018· 68 citedOpen Access
PillarHall LHAR structure for thin film conformality measurements
2018
Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes
Applied Physics Letters·2017· 34 citedOpen Access
Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures
2017
Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports
2017
Modelling of conformality of Atomic Layer Deposition in lateral high aspect ratio structures
2017
Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes
2017
Erratum: Piezoelectric coefficients and spontaneous polarization of ScAlN (2015 <i>J. Phys. Condens. Matter</i> 27 245901)
Journal of Physics Condensed Matter·2015· 25 citedOpen Access
Piezoelectric coefficients and spontaneous polarization of ScAlN
Journal of Physics Condensed Matter·2015· 337 cited
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Frequent Co-authors

Tuomas Pensala(13), Tommi Riekkinen(7), Oili Ylivaara(7), Timo Ranta-aho(5), J. Kaitila(5), J. Ellä(5), Riikka L. Puurunen(5), Mikko Utriainen(5), A. Nurmela(5), Jyrki Molarius(4), Jihong Yim(4), Virpi Korpelainen(4), J. M. Molarius(4), T. Makkonen(4), Johanna Meltaus(4), H. Kattelus(3), Eero Haimi(3), Emma Verkama(3), Juha Hassel(3), Martin Kulawski(3)