Engineering · Physical Sciences
3h-index36citations6works0.02yr avg
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Research Topics
Advancements in Photolithography Techniques(5), Electron and X-Ray Spectroscopy Techniques(3), Industrial Vision Systems and Defect Detection(3), Semiconductor materials and devices(1), Advancements in Semiconductor Devices and Circuit Design(1)
Publications6 total
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010· 17 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010· 13 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 2 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 4 cited
Frequent Co-authors
Rafael C. Howell(4), Shufeng Bai(3), Jen-Shiang Wang(3), George Z. Chen(3), Tadahiro Takigawa(3), Jim Wiley(2), Yasuko Saito(2), Stephen D. H. Hsu(2), James N. Wiley(2), Yifan Chen(2), Fanglin Chen(2), Yu Cao(2), Hideo Tsuchiya(2), Kinya Usuda(2), Masakazu Tokita(2), Fumio Ozaki(2), Nobutaka Kikuiri(2), Yoshitake Tsuji(2), Takashi Kamikubo(1), Takayuki Ohnishi(1)