Karen Maex

Engineering · Physical Sciences

48h-index12.3kcitations754works0.02yr avg
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Research Topics

Semiconductor materials and devices(303), Copper Interconnects and Reliability(283), Semiconductor materials and interfaces(269), Silicon and Solar Cell Technologies(138), Metal and Thin Film Mechanics(98)

Publications753 total

Characterisation of the local stress induced by shallow trench isolation and CoSi2 silicidation
2018
EFTEM study of plasma etched low-k Si-O-C dielectrics
2018· 1 cited
Design and Performance Comparison of 6-T SRAM Cell in 32nm CMOS, FinFET and CNTFET Technologies
2016
A low leakage 500MHz 2T embedded dynamic memory with integrated semi-transparent refresh
Solid-State Electronics·2012· 1 citedOpen Access
Direct observation of preferential heating near grain boundaries in patterned silicide films
Journal of Applied Physics·2010· 4 cited
Comment on “MEL‐type Pure‐Silica Zeolite Nanocrystals Prepared by an Evaporation‐Assisted Two‐Stage Synthesis Method as Ultra‐Low‐<i>k</i> Materials”
Advanced Functional Materials·2010· 9 cited
Electrochemical Tailoring of Catalyst Nanoparticles for CNT Spatial-Dimension Control
Journal of The Electrochemical Society·2010· 9 cited
Selective Growth of Carbon Nanotubes on Silicon from Electrodeposited Nickel Catalyst
Science of Advanced Materials·2009· 8 cited
Effects of Silica Sources on Nanoporous Organosilicate Films Templated with Tetraalkylammonium Cations
MRS Proceedings·2009
Complementary Silicon-Based Heterostructure Tunnel-FETs With High Tunnel Rates
IEEE Electron Device Letters·2008· 185 cited
Copper CMP with Composite Polymer Core–Silica Shell Abrasives: A Defectivity Study
Journal of The Electrochemical Society·2008· 39 cited
Zeolite-Inspired Low-<i>k</i>Dielectrics Overcoming Limitations of Zeolite Films
Journal of the American Chemical Society·2008· 39 cited
The reasons why metals catalyze the nucleation and growth of carbon nanotubes and other carbon nanomorphologies
Carbon·2008· 320 cited
Nanoporous Organosilicate Films Prepared in Acidic Conditions Using Tetraalkylammonium Bromide Porogens
Advanced Functional Materials·2008· 9 cited
Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions
Microporous and Mesoporous Materials·2008· 21 cited
Boosting the on-current of a n-channel nanowire tunnel field-effect transistor by source material optimization
Journal of Applied Physics·2008· 138 cited
Influence of absorbed water components on SiOCH low-k reliability
Journal of Applied Physics·2008· 86 cited
Study of metal-related deep-level defects in germanide Schottky barriers on n-type germanium
Journal of Applied Physics·2008· 23 cited
Evidence of Large Voids in Pure‐Silica‐Zeolite Low‐<i>k</i> Dielectrics Synthesized by Spin‐on of Nanoparticle Suspensions
Advanced Materials·2008· 34 cited
Boosting the on-current of silicon nanowire tunnel-FETs
2008
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Frequent Co-authors

Caroline M. Whelan(8), Mikhaı̈l R. Baklanov(7), A. Lauwers(7), Denis Shamiryan(6), Sywert Brongersma(5), G. Groeseneken(5), Luc Van den hove(5), Anne S. Verhulst(4), An Steegen(4), Richard Lindsay(4), Gerald Beyer(4), V. Probst(4), William G. Vandenberghe(3), Roger Palmans(3), S. Vanhaelemeersch(3), J. A. Kittl(3), O. Chamirian(3), M. de Potter(3), Michael Kinsella(3), L. Carbonell(3)