Ling-Wu Yang

Macronix International (Taiwan) — Taiwan

Engineering · Physical Sciences

14h-index627citations51works1.02yr avg
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Research Topics

Semiconductor materials and devices(33), Advanced Data Storage Technologies(14), Integrated Circuits and Semiconductor Failure Analysis(13), Advancements in Semiconductor Devices and Circuit Design(12), Advancements in Photolithography Techniques(10)

Publications51 total

Charge Loss Improvement in 3D Flash Memory by Molecular Oxidation of Tunneling Oxide
2024· 1 cited
PMOS junction optimization for 3D NAND FLASH memory with CMOS under array
Solid-State Electronics·2023
Cryogenic implantation to boost PFET performance and reduce variability in 3D NAND flows
MRS Advances·2022· 2 cited
Improvement of cell reliability by floating gate implantation on 1Xnm NAND flash memory
Solid-State Electronics·2018
Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition
Solid-State Electronics·2017· 15 cited
Thermal Stability of Cobalt Silicide on Polysilicon Implanted with Germanium
2016· 2 cited
Investigation of Floating Gate Implantation Effect on 1Xnm NAND FLASH
2016· 1 cited
Advanced high accuracy scanning electron microscopy review methodology by virtual defect — Yiting Kuo
International Symposium on Semiconductor Manufacturing·2015· 1 cited
Advanced process control of effective field height in a single wafer spin cleaning tool
2014
FOUP mini-environment contaminants analysis in semiconductor manufacturing
2014· 1 cited
3D interconnect simulation applied to CMP thickness variations
2014
Study on the improved thermal stability of cobalt silicide film by using cryogenic carbon PAI
2014· 2 cited
A study of surface condensation defect improvement after cryogenic implantation
2014
Investigation of floating gate depletion effect on NAND FLASH reliability
2014· 2 cited
FOUP N<inf>2</inf> purge engineering in Fab
2013
Detecting buried voids in copper interconnect
2013· 1 cited
Inspection flow of yield impacting systematic defects
2013· 3 cited
Study of charge trapping characteristics of SONOS with various trapping layers using gate-sensing and channel-sensing (GSCS) method
Solid-State Electronics·2013
Sensitivities improvement by utilizing dark mode of bright filed inspection
2012· 1 cited
Optics selection by high magnification optical micrograph in bright field inspection
2012· 1 cited
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Frequent Co-authors

Tahone Yang(45), Kuang‐Chao Chen(43), Chih-Yuan Lu(26), Hang-Ting Lue(22), Jung-Yu Hsieh(22), Chih‐Yuan Lu(20), Kuang-Yeu Hsieh(18), Szu-Yu Wang(16), Tuung Luoh(16), Erh-Kun Lai(12), Rich Liu(12), Jeng-Hwa Liao(11), Tzu‐Hsuan Hsu(9), Chi-Pin Lu(9), Yi‐Hsuan Hsiao(8), Pei-Ying Du(7), Sheng-Chih Lai(5), F. H. Hsu(5), N. Z. Lien(5), Jeng Gong(5)